Unit1
Unit 1: Introduction to MEMS
8 hrsMEMS Fabrication Technologies, Materials and Substrates for MEMS, Processes for Micromachining, Characteristics, Sensors/Transducers, Piezoresistance Effect, Piezoelectricity, Piezoresistive Sensor.
Syllabus
5 units · 40 lecture hoursUnit2
Unit 2: Mechanics of Beam and Diaphragm Structures
8 hrsStress and Strain, Hooke's Law. Stress and Strain of Beam Structures: Stress, Strain in a Bent Beam, Bending Moment and the Moment of Inertia, Displacement of Beam Structures Under Weight, Bending of Cantilever Beam Under Weight.
Unit3
Unit 3: Air Damping
8 hrsDrag Effect of a Fluid: Viscosity of a Fluid, Viscous Flow of a Fluid, Drag Force Damping, The Effects of Air Damping on Micro-Dynamics. Squeeze-film Air Damping: Reynolds' Equations for Squeeze-film Air Damping, Damping of Perforated Thick Plates. Slide-film Air Damping: Basic Equations for Slide-film Air Damping, Couette-flow Model, Stokes-flow Model.
Unit4
Unit 4: Electrostatic Actuation
8 hrsElectrostatic Forces, Normal Force, Tangential Force, Fringe Effects, Electrostatic Driving of Mechanical Actuators: Parallel-plate Actuator, Capacitive sensors. Step and Alternative Voltage Driving: Step Voltage Driving, Negative Spring Effect and Vibration Frequency.
Unit5
Unit 5: Thermal Effects
8 hrsTemperature coefficient of resistance, Thermo-electricity, Thermocouples, Thermal and temperature sensors. Applications of MEMS in RF MEMS Resonator Design Considerations, One-Port Micromechanical Resonator Modeling Vertical Displacement Two-Port Microresonator Modeling, Micromechanical Resonator Limitations.
Course Objectives
- After completion of the course student will be able to:
- Understand the Basic concept of MEMS, Mechanics of Beam and Diaphragm Structures, Air Damping and Electrostatic Actuation.
- Know the knowledge of Thermal Effects and the Applications of MEMS in RF.
Course Outcomes (COs)
After completion of the course student will be able to:
- CO1Understand the Basic concept of MEMS Fabrication Technologies, Piezoresistance Effect, Piezoelectricity, Piezoresistive Sensor.
- CO2Explain Mechanics of Beam and Diaphragm Structures.
- CO3Understand the Basic concept of Air Damping and Basic Equations for Slide-film Air Damping, Couette-flow Model, Stokes-flow Model.
- CO4Know the concept of Electrostatic Actuation.
- CO5Understand the applications of MEMS in RF
Text & Reference Books
- G. K. Ananthasuresh, K. J. Vinoy, S. Gopalakrishnan, K. N. Bhat and V. K. Atre, “Micro and smart systems”, Wiley India, 2010.
- S.M. Sze, “Semiconductor Sensors”, John Wiley & Sons Inc., Wiley Interscience Pub.
- M.J. Usher, “Sensors and Transducers”, McMillian Hampshire.
- RS Muller, Howe, Senturia and Smith, “Micro sensors”, IEEE Press.
Official AKTU syllabus
This subject is on page 6 of the original AKTU PDF.