VLSI Technology

SSI, MSI, LSI, VLSI Integrated Circuits. Crystal Growth and Wafer Preparation: Electronic Grade Silicon, Czochralski Crystal Growth, Silicon Shaping, Processing Considerations. Wafer Cleaning Technology - Basic Concepts, Wet cleaning, Dry cleaning

Vapor-Phase Epitaxy, Molecular Beam Epitaxy, Silicon on Insulators, Epitaxial Evaluation. Oxidation: Growth Kinetics, Thin Oxides, Oxidation Techniques and Systems, Oxides Properties.

Optical Lithography, Electron beam lithography, Photo masks, Wet Chemical Etching. Dielectric and Polysilicon Film Deposition: Deposition Processes of Polysilicon, Silicon Dioxide, Silicon Nitride.

Models of diffusion in solids, Fick’s 1-Dimensional diffusion equation, Diffusion of Impurities in Silicon and Silicon Dioxide, Diffusion Equations, Diffusion Profiles, Diffusion Furnace, Solid, Liquid and Gaseous Sources, Ion-Implantation: Ion-Implantation Technique, Range Theory, Implantation Equipment.

Metallization Application, Metallization Choices, Physical Vapor Deposition, Vacuum Deposition, Sputtering Apparatus. Packaging of VLSI devices: Package Types, Packaging Design Consideration, VLSI Assembly Technologies, Package Fabrication Technologies, CMOS fabrication steps. Text